Contact us

MEMS Lab

 

location :
303-523, Graduate School of Mechanical Engineering, Pusan National University, Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 609-735, Republic of Korea
 
Tel : +82-051-510-2737
E-mail : pnumemslab@gmail.com

Core technology

 

- Micro Patterning :
Double side aligner, CD : 1um
(for 4or6 inch wafer)
 
- Thin Layer Deposition:
Furnace, LPCVD, PECVD, E-beam, Sputtering ( Oxide layer, Nitride layer, metalic layer, etc.)
 
- Deep Reactive Ion Ethicng
 
- Electro micro forming system:
Nickel, Copper
 
- Polymer Replication:
Micro casting, Micro injection
 
- Surface Treatment
 
- Laser Machining:
UV laser ( for Metal Polymer)

MEMS Lab. School of MEchanical Eng., Pusan Univ.

Pusan, Republic of Korea

+82 051-510-2737

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